Electron bombardment heating apparatus and temperature controlling apparatus and control method thereof
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United States of America Patent
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Jan 22, 2008
Grant Date -
Nov 11, 2004
app pub date -
Apr 8, 2004
filing date -
May 9, 2003
priority date (Note) -
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Abstract
An electron bombardment heating apparatus, in which thermions emitted from filaments 9 are accelerated and impinge upon a heating plate 2, so as to heat the heating plate 2, wherein a peripheral wall of a heated material supporting member 1 having a heating plate as a ceiling thereof is made of multi-staged peripheral wall portions 13a and 13b, positioned vertically and having a different radius, and those peripheral wall portions 13a and 13b are connected with each other by means of a ring-like horizontal wall 5. With this, thermal stress can be mitigated, which is caused due to a difference in temperature between the lower end portion of the heated material supporting member 1 and the heating plate 2 when heating up the heating plate 2, thereby causing no breakage in the heated material supporting member when conducting heating and cooling upon the heating plate, repetitively.
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