System for inspecting a surface employing configurable multi angle illumination modes
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United States of America Patent
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Jan 1, 2008
Grant Date -
Apr 27, 2006
app pub date -
May 5, 2005
filing date -
Oct 25, 2004
priority date (Note) -
Expired
status (Latency Note)
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Abstract
Apparatus for inspection of a surface, the apparatus including an objective having central and peripheral regions, which is positioned to focus an input beam through the central region in a normal direction onto the surface. The apparatus further includes a first periscope which is positionable to divert the input beam so as to pass through the peripheral region of the objective, whereby the objective focuses the input beam in an oblique direction onto the surface. There is also a second periscope which is positionable to capture radiation reflected from the surface in the oblique direction after passage of the reflected radiation through the peripheral region of the objective.
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