Alignment method and parameter selection method
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United States of America Patent
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Dec 25, 2007
Grant Date -
Dec 1, 2005
app pub date -
Aug 3, 2005
filing date -
Jan 8, 2002
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A method of aligning an object including steps of detecting an image of a mark on the object with respect to each of a plurality of areas on the object, obtaining a position of the mark based on the detected image with respect to each image detected in the detecting step, extracting a feature of the mark based on the detected image with respect to each image detected in the detecting step, determining a correction value based on previously prepared information to relate the extracted feature to the correction value, with respect to each position obtained in the obtaining step, correcting the obtained position based on the correction value with respect to each position obtained in the obtaining step, and calculating a position of each of a plurality of areas on the object based on positions corrected in the correcting step.
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