Polarized radiation in lithographic apparatus and device manufacturing method
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United States of America Patent
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Dec 25, 2007
Grant Date -
Jun 29, 2006
app pub date -
Dec 28, 2004
filing date -
Dec 28, 2004
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Abstract
A lithographic apparatus uses polarized light to improve the imaging properties, such as exposure latitude, while maintaining and extending the lifetime of an illumination system in the lithographic apparatus.
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