Portable manipulator for stackable semiconductor test system
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United States of America Patent
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Dec 25, 2007
Grant Date -
Feb 1, 2007
app pub date -
Jul 29, 2005
filing date -
Jul 29, 2005
priority date (Note) -
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Abstract
This invention provides a manipulator for positioning a test head relative to a prober or other reference. The manipulator has a frame; a linkage coupled to the frame and including first and second links having freedom of rotation about respective pivots and a third link coupled to the first and second links such that the third link has translational and rotational degrees of freedom of movement; and an adaptor coupled to the third link and configured to attach to a test head. The invention also provides a method of controlling the manipulator.
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