Method of adhering polishing pads and jig for adhering the same
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United States of America Patent
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Dec 11, 2007
Grant Date -
Apr 19, 2007
app pub date -
Oct 16, 2006
filing date -
Oct 17, 2005
priority date (Note) -
Expired
status (Latency Note)
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Abstract
The method of adhering polishing pads is capable of easily exchanging polishing pads in a comfortable posture. The method comprises the steps of: setting a pad adhering carrier, which has a through-hole in which a roller unit for pressing polishing pads is fixed, in a holder with arranging a roller unit in a radial direction of a lower polishing plate and an upper polishing plate; relatively moving the upper polishing plate toward the lower polishing plate so as to clamp the roller unit between the lower polishing plate and the upper polishing plate with a prescribed force; rotating the lower polishing plate and the upper polishing plate, which clamp the roller unit, in the opposite directions at the same speed; and pressing the polishing pads onto polishing faces of the lower polishing plate and the upper polishing plate by the roller unit.
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