Inspection method and inspection apparatus
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United States of America Patent
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Dec 4, 2007
Grant Date -
Aug 31, 2006
app pub date -
May 2, 2006
filing date -
Aug 21, 2000
priority date (Note) -
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Abstract
Disclosed is an inspection method for inspecting the electrical characteristics of a device by bringing an inspecting probe into electrical contact with an inspection electrode. An insulating film formed on the surface of the inspection electrode is broken by utilizing a fritting phenomenon so as to bring the inspection electrode into electrical contact with the inspection electrode.
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