Analysis of elemental composition and thickness in multilayered materials
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United States of America Patent
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Nov 27, 2007
Grant Date -
Apr 26, 2007
app pub date -
Oct 4, 2006
filing date -
Oct 4, 2005
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Expired
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Abstract
A method and computer program software product for establishing an areal density of an elemental constituent of one layer of a stack of layers of material overlying a substrate. Incident penetrating radiation excites characteristic x-ray fluorescent radiation in multiple lines associated with each of one or more elements. Areal densities of successive layers are determined by self-consistent solution of equations relating the ratios of intensities of the characteristic fluorescence lines of successive elements.
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