Conformal coatings for micro-optical elements, and method for making the same
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United States of America Patent
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Nov 13, 2007
Grant Date -
Oct 7, 2004
app pub date -
Mar 31, 2003
filing date -
Mar 31, 2003
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Abstract
A micro-optical element is produced through vapor deposition techniques, such as atomic layer deposition. An optical structure having a surface with uneven structures is exposed to one or more precursor vapors to create a self-limiting film growth on the surface of the optical structure. The film thickness may be increased and controlled by subsequent exposures. The resulting film conforms to surface structures having varying complex dimensions.
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