Importance

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Abstract

To provide a magnetic bearing device capable of reducing vibration by preventing a deterioration in the control of a rotor shaft due to a variation in the axial position of the rotor shaft, while performing positional control over the rotor shaft in a specific attitude with optimal magnetic force, and to a turbo molecular pump with the magnetic bearing device mounted thereto. A sensitivity storage section 281 stores therein a sensor sensitivity used in a sensor sensitivity adjustment. The sensitivity storage section 281 outputs the stored sensor sensitivity to a sensitivity switching section. The sensitivity switching section switches the sensor sensitivity according to the situation, and outputs the result to a sensor signal amplifier section. The sensor signal amplifier section 252 performs, to a sensor signal, the sensor sensitivity adjustment according to the sensor sensitivity stored in the sensitivity storage section 281, and outputs, to an A/D converter 154, a sensor output signal 153 having a sensor output voltage V after the sensor sensitivity adjustment.

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First Claim