Detection of an unstable additive breakdown product in a plating bath
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United States of America Patent
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Nov 6, 2007
Grant Date -
Nov 10, 2005
app pub date -
May 4, 2004
filing date -
May 4, 2004
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Expired
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Abstract
The 3-mercaptopropylsulfonic acid (MPSA) breakdown product of the bis(sodiumsulfopropyl)disulfide (SPS) additive used in acid copper plating baths accelerates copper electrodeposition and can be detected by cyclic voltammetric stripping (CVS) analysis. In the presence of oxygen, MPSA decomposes rapidly in acid copper sulfate baths so that the CVS stripping peak area (A.sub.r) decreases on successive cycles. The slope of a plot of A.sub.r vs. CVS cycle number (or time) or logarithm of the CVS cycle number (or time) provides a measure of the initial MPSA concentration.
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