Broadband cavity spectrometer apparatus and method for determining the path length of an optical structure
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United States of America Patent
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Oct 30, 2007
Grant Date -
Apr 19, 2007
app pub date -
Oct 14, 2005
filing date -
Oct 14, 2005
priority date (Note) -
Expired
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Abstract
A broadband light source with a sufficiently long coherence length is impinged on the optical cavity. The broadband laser light reflects from the first and second surfaces of the cavity. The two light beams, either reflected or transmitted, are phase shifted from one another by an amount proportional to the optical path length of the cavity and inversely proportional to the wavelength of the light (4.pi.nd/.lamda.) The two light beams interfere with each other and form a modulated light beam that has a spectrum approximately like the laser's broadband spectrum multiplied by a cosine with a frequency 4.pi.nd/.lamda.. The modulated light beam is coupled to a spectrometer that measures the intensity of the light as a function of wavelength over a range of wavelengths. The Fourier transform of the spectrum contains a peak that is related to the OPL and is located at 2*n*d where n*d is the OPL.
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