Metal-insulator-metal capacitor and method for manufacturing the same
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United States of America Patent
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Oct 23, 2007
Grant Date -
Mar 16, 2006
app pub date -
Nov 2, 2005
filing date -
Mar 10, 2003
priority date (Note) -
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Abstract
A capacitor has a lower electrode formed on an insulation layer, a dielectric layer formed on the lower electrode, an upper electrode layer formed on the dielectric layer, and a first protection layer pattern formed on the upper electrode layer. The upper electrode layer is etched using the first protection layer pattern to form an upper electrode. A second protection layer is formed enclosing the dielectric layer, the upper electrode and the first protection layer pattern.
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