Holding device for disk-shaped objects
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United States of America Patent
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Oct 23, 2007
Grant Date -
Feb 10, 2005
app pub date -
Aug 6, 2004
filing date -
Aug 7, 2003
priority date (Note) -
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status (Latency Note)
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Abstract
Semiconductor technology requires the use of object holders, which are capable of holding wafers securely, also during rotation. In order to save time and expense, such holders should be suitable for integration directly into a processing facility, wherever possible. According to the invention it is proposed to provide centrally mounted holders which comprise support surfaces for the wafer and pivotable gripper fingers, in which the gripper fingers are pretensioned by means of at least one pretension element in the holding position and are actuated through one opening mechanism, in which at least one opening mechanism and at least one pretension element are integrated in the central clamping arm fixture and/or in the clamping arms.
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