Arrangement comprising a support body and a substrate holder which is driven in rotation and gas-supported thereon
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United States of America Patent
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Oct 16, 2007
Grant Date -
Aug 12, 2004
app pub date -
Nov 26, 2003
filing date -
May 29, 2001
priority date (Note) -
Expired
status (Latency Note)
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Abstract
The invention relates to an arrangement comprising a support body with a substrate holder, mounted thereon on a gas bearing with rotating drive. The gas bearing and the rotating drive are formed by gas flowing in through nozzles arranged in the separating gaps between support body and substrate. The support body and the substrate holder are embodied as rings, whereby the rings lie on each other in a self-centering manner and the one ring comprises a ring bead extending into a ring recess on the other ring.
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