Dielectric-coated electrode, plasma discharge treatment apparatus and method for forming thin film
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United States of America Patent
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Oct 16, 2007
Grant Date -
Dec 11, 2003
app pub date -
Jun 5, 2003
filing date -
Jun 11, 2002
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Abstract
A dielectric-coated electrode having a conductive base material coated with a dielectric on a surface thereof, the dielectric including a first metal atom and a second metal atom. As for an ionic strength of the first metal atom and an ionic strength of the second metal atom according to a dynamic SIMS measurement, the ionic strength of the second metal atom is larger than the ionic strength of the first metal atom from the most surface of the dielectric toward a predetermined depth of the dielectric, and the ionic strength of the first metal atom is larger than the ionic strength of the second metal atom from the predetermined depth toward the surface of the conductive base material.
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