Physical quantity measuring method and device therefor
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United States of America Patent
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Oct 9, 2007
Grant Date -
Dec 9, 2004
app pub date -
Sep 18, 2002
filing date -
Sep 21, 2001
priority date (Note) -
Expired
status (Latency Note)
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Abstract
Light emitted by a light source is inputted to a sensor to generate an optical path difference on input light according to a physical parameter to be measured, light outputted with an optical path difference generated in response to the input is inputted to another sensor to generate an optical path difference on input light according to a physical parameter to be measured, and light outputted with an optical path difference generated in response to the input is split into two to generate an interference fringe. Due to the presence of light which is changed in optical path length in the first sensor, is inputted to the sensor of the subsequent stage, and is transmitted without being changed in optical path length, and light which is not changed in optical path length in the first sensor, is inputted to the sensor of the subsequent stage, and is transmitted after being changed in optical path length, an interference fringe is generated with an fringe located on a position corresponding to a difference value between physical parameters to be measured. Thus, a difference value between physical parameters is measured by detecting the position.
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