Membrane sensor
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United States of America Patent
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Oct 9, 2007
Grant Date -
Sep 7, 2006
app pub date -
Feb 18, 2004
filing date -
Mar 11, 2003
priority date (Note) -
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Abstract
A micromechanical sensor and a method for manufacturing a micromechanical sensor which has at least one membrane are provided. The membrane is made of a first material which is accommodated in a surrounding second material, and the membrane is configured for sensing a medium surrounding it. The membrane is reinforced, at least partly, by a third material at break-sensitive points on the membrane rim. Reinforcement of the membrane rim increases the stability and thus also the service life of the membrane and the sensor.
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