Projection method including pupillary filtering and a projection lens therefor
Number of patents in Portfolio can not be more than 2000
United States of America
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Oct 2, 2007
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N/A
app pub date -
Oct 29, 2004
filing date -
Oct 29, 2004
priority date (Note) -
Withdrawn
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Abstract
A catadioptric lens with optical elements, which are arranged along an optical axis and with at least one concave mirror located in the vicinity of a pupillar surface of the projection lens. The concave mirror is sub-divided into a number of annular or honeycomb mirror segments, which can be displaced independently in relation to one another with the aid of piezoelectric drive elements. The mirror can be used as a phase-shifting pupillar filter, whereby the filtration function can be adjusted by the relative displacement of the mirror elements in relation to one another.
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