Projection method including pupillary filtering and a projection lens therefor

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 7277157
SERIAL NO

10975496

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A catadioptric lens with optical elements, which are arranged along an optical axis and with at least one concave mirror located in the vicinity of a pupillar surface of the projection lens. The concave mirror is sub-divided into a number of annular or honeycomb mirror segments, which can be displaced independently in relation to one another with the aid of piezoelectric drive elements. The mirror can be used as a phase-shifting pupillar filter, whereby the filtration function can be adjusted by the relative displacement of the mirror elements in relation to one another.

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Patent Owner(s)

  • CARL ZEIS SMT AG

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Haag, Ulrich Aalen, DE 15 101
Hembd-Soellner, Christian Stuttgart, DE 2 15
Holderer, Hubert Koenigsbronn, DE 72 1034
Von, Buenau Rudolf Essingen, DE 22 581

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