Projection method including pupillary filtering and a projection lens therefor
Number of patents in Portfolio can not be more than 2000
United States of America
Stats
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Oct 2, 2007
Issued Date -
N/A
app pub date -
Oct 29, 2004
filing date -
Oct 29, 2004
priority date (Note) -
Withdrawn
status (Latency Note)
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Abstract
A catadioptric lens with optical elements, which are arranged along an optical axis and with at least one concave mirror located in the vicinity of a pupillar surface of the projection lens. The concave mirror is sub-divided into a number of annular or honeycomb mirror segments, which can be displaced independently in relation to one another with the aid of piezoelectric drive elements. The mirror can be used as a phase-shifting pupillar filter, whereby the filtration function can be adjusted by the relative displacement of the mirror elements in relation to one another.
First Claim
all claims..Other Claims data not available
Family
Country | kind | publication No. | Filing Date | Type | Sub-Type |
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- 15 United States
- 10 France
- 8 Japan
- 7 China
- 5 Korea
- 2 Other
Patent Owner(s)
- CARL ZEIS SMT AG
International Classification(s)
Inventor(s)
Inventor Name | Address | # of filed Patents | Total Citations |
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Haag, Ulrich | Aalen, DE | 15 | 101 |
# of filed Patents : 15 Total Citations : 101 | |||
Hembd-Soellner, Christian | Stuttgart, DE | 2 | 15 |
# of filed Patents : 2 Total Citations : 15 | |||
Holderer, Hubert | Koenigsbronn, DE | 72 | 1034 |
# of filed Patents : 72 Total Citations : 1034 | |||
Von, Buenau Rudolf | Essingen, DE | 22 | 581 |
# of filed Patents : 22 Total Citations : 581 |
Cited Art Landscape
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Patent Citation Ranking
- 6 Citation Count
- G03B Class
- 5.09 % this patent is cited more than
- 18 Age
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Maintenance Fees
Fee | Large entity fee | small entity fee | micro entity fee | due date |
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Fee | Large entity fee | small entity fee | micro entity fee |
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Surcharge after expiration - Late payment is unavoidable | $700.00 | $350.00 | $175.00 |
Surcharge after expiration - Late payment is unintentional | $1,640.00 | $820.00 | $410.00 |
Full Text

Legal Events
Date | Code | Event | Description |
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Aug 08, 2011 | STCH | INFORMATION ON STATUS: PATENT DISCONTINUATION | free format text: PATENT EXPIRED DUE TO NONPAYMENT OF MAINTENANCE FEES UNDER 37 CFR 1.362 |
Jul 10, 2011 | LAPS | LAPSE FOR FAILURE TO PAY MAINTENANCE FEES | |
Feb 14, 2011 | REMI | MAINTENANCE FEE REMINDER MAILED | |
Jul 03, 2010 | FP | EXPIRED DUE TO FAILURE TO PAY MAINTENANCE FEE | Effective Date: Jul 03, 2010 |
Jul 10, 2007 | I | Issuance | |
Jul 22, 2004 | P | Published | |
Dec 18, 2003 | AS | ASSIGNMENT | free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:TAKAHASHI, SEIKI;REEL/FRAME:015153/0446 Owner name: IWATE UNIVERSITY, JAPAN Effective Date: Dec 18, 2003 |
Dec 10, 2003 | F | Filing | |
Dec 19, 2002 | PD | Priority Date |

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