Projection method including pupillary filtering and a projection lens therefor

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United States of America

PATENT NO 7277157
SERIAL NO

10975496

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Abstract

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A catadioptric lens with optical elements, which are arranged along an optical axis and with at least one concave mirror located in the vicinity of a pupillar surface of the projection lens. The concave mirror is sub-divided into a number of annular or honeycomb mirror segments, which can be displaced independently in relation to one another with the aid of piezoelectric drive elements. The mirror can be used as a phase-shifting pupillar filter, whereby the filtration function can be adjusted by the relative displacement of the mirror elements in relation to one another.

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Patent Owner(s)

  • CARL ZEIS SMT AG

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Haag, Ulrich Aalen, DE 15 101
Hembd-Soellner, Christian Stuttgart, DE 2 15
Holderer, Hubert Koenigsbronn, DE 72 1034
Von, Buenau Rudolf Essingen, DE 22 581

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  • 6 Citation Count
  • G03B Class
  • 5.09 % this patent is cited more than
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Citation count rangeNumber of patents cited in rangeNumber of patents cited in various citation count ranges4249215872241594321301 - 1011 - 2021 - 3031 - 4041 - 5051 - 6061 - 7071 - 8081 - 9091 - 100100 +0255075100125150175200225250275300325350375400425450475500525

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