Apparatus and method for optimizing a pellicle for off-axis transmission of light
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United States of America Patent
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Sep 18, 2007
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N/A
app pub date -
Feb 15, 2001
filing date -
Feb 16, 2000
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Abstract
An apparatus and method for optimizing a pellicle for off-axis transmission are disclosed. A pellicle includes a thin film optimized for transmission of off-axis incident light at a desired angle. The pellicle further includes an optical thickness greater than a design thickness by less than or equal to approximately one-quarter of an exposure wavelength.
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