Passive SAW-based hydrogen sensor and system
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United States of America Patent
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Sep 11, 2007
Grant Date -
Mar 8, 2007
app pub date -
Jan 19, 2006
filing date -
Sep 7, 2005
priority date (Note) -
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Abstract
A hydrogen detecting system is characterized by a passive surface acoustic wave (SAW) sensor. The sensor includes a piezoelectric substrate having a self assembled monolayer arranged on at least a portion of the substrate to create a hydrophobic surface. A palladium nanocluster thin film is deposited on the monolayer and an interdigital SAW transducer is disposed upon the piezoelectric substrate for conversion of an RF signal into an acoustic wave and vice versa. At least one additional SAW element is also disposed on the substrate and spaced from the SAW transducer. The SAW element receives a signal from the SAW transducer and produces a response signal. The response signal is modified by the palladium nanocluster film due to a change in conductivity of the palladium nanocluster film upon exposure to hydrogen. This change in the response signal is measured by an interrogator, and yields a measure of the hydrogen concentration to which the sensor was exposed.
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