Optical multilayer film and optical semiconductor device including the same
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United States of America Patent
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Sep 11, 2007
Grant Date -
Mar 4, 2004
app pub date -
Aug 27, 2003
filing date -
Aug 30, 2002
priority date (Note) -
Expired
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Abstract
An optical multilayer film includes: a first layer; a second layer that contains titanium oxynitride as a main component; and a third layer that contains magnesium fluoride as a main component; the first layer that has a different refractive index from that of the second layer or the third layer; and the first layer, the second layer, and the third layer being part of a laminated structure that includes a plurality of reflection planes. The thickness of the third layer is smaller than 1/4 wavelength.
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