Method and apparatus for treating a disc substrate
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United States of America Patent
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Sep 11, 2007
Grant Date -
Jun 5, 2003
app pub date -
Dec 3, 2002
filing date -
Dec 5, 2001
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A molded disc substrate obtained by injection molding is rotated at high speed before the molded disc substrate has solidified, and a gas is also made to flow in an outward radial direction along a bottom surface of the molded disc substrate while the molded disc substrate is rotating, and the rotation is stopped after the molded disc substrate has solidified. Thus, a disc substrate with little warping is obtained in a short time.
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