Method of fabricating optical filters

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United States of America Patent

PATENT NO 7267781
APP PUB NO 20050003665A1
SERIAL NO

10871689

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A method of fabricating optical filter is disclosed. The method includes providing the substrate and selectively etching the substrate to form a plurality of freestanding layers. A plurality of dielectric layers is disposed over an outer surface of each of the freestanding layers. The resultant optical filters may be used in a variety of applications including etalon applications.

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Patent Owner(s)

Patent OwnerAddress
SAMSUNG ELECTRONICS CO LTD129 SAMSUNG-RO YEONGTONG-GU GYEONGGI-DO SUWON-SI 16677

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Dautartas, Mindaugas F Blacksburg, VA 57 1170
Sherrer, David W Blacksburg, VA 107 4596
Steinberg, Dan A Blacksburg, VA 70 829

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