Replacement apparatus for an optical element
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United States of America Patent
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Sep 4, 2007
Grant Date -
Jun 23, 2005
app pub date -
Oct 15, 2004
filing date -
Dec 23, 2003
priority date (Note) -
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Abstract
A replacement apparatus for an optical element mounted between two adjacent optical elements in a lithography objective has a holder for the optical element to be replaced, which holder can be moved into the lithography objective through a lateral opening in a housing of the same.
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