Blazed diffractive optical element and projection objective for a microlithographic projection exposure apparatus
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United States of America Patent
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Aug 28, 2007
Grant Date -
Jun 22, 2006
app pub date -
Nov 17, 2005
filing date -
May 17, 2003
priority date (Note) -
Expired
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Abstract
A blazed diffractive optical element has a support and a plurality of blazed diffraction structures. The diffraction structures are applied on the support and are spaced apart by a locally varying grating constant. In a first region, the diffraction structures have an at least approximately ramp-shaped profile. In a second region, the diffraction structures are binary blazed by splitting them into substructures that may have the shape of pillars or bars.
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