Reticle-processing system
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United States of America Patent
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Aug 21, 2007
Grant Date -
Jun 15, 2006
app pub date -
Dec 5, 2005
filing date -
Dec 14, 2004
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A reticle-processing system includes a reticle-carrying container, a transfer rail for transferring the reticle-carrying container, a light exposure apparatus for printing a circuit pattern, and a reticle stocker for keeping a plurality of reticles. Orientation changer detects the orientation of the reticle-carrying container and changes it appropriately and is located in a path from the reticle stocker to a printing position in the light exposure apparatus. The orientation changer includes a rotary drive for rotating the reticle-carrying container, an orientation detector 83 for detecting the orientation of the reticle-carrying container, which is provided in the path from the reticle stocker to the printing position in the light exposure apparatus, and a controller for, when the orientation detected by the orientation detector is shifted by 180 degrees, controlling the rotary drive so as to correct the orientation.
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