Directed growth of nanotubes on a catalyst
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United States of America Patent
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Aug 21, 2007
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N/A
app pub date -
Mar 23, 2006
filing date -
Sep 8, 2000
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Abstract
A nanostructure is fabricated using charged particle deposition to deposit a catalyst on a substrate. A charged particle beam is directed to location on the substrate where the catalyst is to be deposited, with a beam-activated precursor gas also being directed to the location. For example, a nickel dot can be selectively deposited onto a substrate by using a charged particle beam to decompose a nickel-containing precursor gas, and then a carbon nanotube can be grown on the nickel dot, with the diameter of the nanotube conforming to the size of the nickel dot.
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