Polishing head elbow fitting
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Jul 24, 2007
Grant Date -
Mar 15, 2007
app pub date -
Sep 14, 2005
filing date -
Sep 14, 2005
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
An improvement is provided for a wafer carrier having an annular inflatable tube for exerting pressure on the edge of a perforated plate during wafer dechucking, and a flexible plastic tube for supplying pressure to the annular inflatable tube. The improvement comprises a fixed elbow fitting secured to said head assembly. The elbow fitting is secured to the head assembly in a predetermined orientation, said orientation being such that said flexible plastic tube will not be obstructed in its path between said fitting and the said inflatable tube and will not obstruct the bellows operation of said wafer carrier. A tool for assisting fitting the fixed orientation elbow fitting in the predetermined orientation. The tool has a planar or substantially planar rigid body with an aperture shaped to accommodate the elbow fitting in one predetermined orientation relative to the tool. Edges of the tool are shaped to bear on features of the polishing head so that at least with the aperture for the fitting in position, the tool is positively located at a predetermined orientation, which, in turn, locates a fitting placed in the aperture in a predetermined orientation, so that it can be fixed in place.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully