Method and apparatus for transferring an article to be processed and processing apparatus
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Jul 24, 2007
Grant Date -
Dec 2, 2004
app pub date -
Mar 16, 2004
filing date -
Mar 31, 2003
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A transferring apparatus transfers an article to be processed, which is carried by a carrier device, to a holder provided in a processing chamber defined by a processing vessel and adapted to hold the article at a specified processing position. The transferring apparatus includes a temporarily holding member, and transfers the article from the intermediate position to the processing position after receiving the article carried by the carrier device at an intermediate position distanced from the holder and temporarily holding it. The temporarily holding member is retracted to a position in the outside of the processing vessel after the article is transferred.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully