Method and arrangement for producing radiation
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United States of America Patent
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Jul 3, 2007
Grant Date -
Jun 16, 2005
app pub date -
May 13, 2003
filing date -
May 13, 2002
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A method of producing a radiating plasma with an increased flux stability and uniformity is disclosed. The method comprises the steps of generating a primary target by urging a liquid under pressure through a nozzle; directing an energy pre-pulse onto the primary target to generate a secondary target in the form of a gas or plasma cloud; allowing the thus formed secondary target to expand for a predetermined period of time; and directing a main energy pulse onto the secondary target when the predetermined period of time has elapsed in order to produce a plasma radiating X-ray or EUV radiation. The pre-pulse has a beam waist size that is larger, in at least one dimension, than the corresponding dimension of the primary target.
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