Modulated scatterometry
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United States of America Patent
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Jul 3, 2007
Grant Date -
Aug 4, 2005
app pub date -
Mar 24, 2005
filing date -
Feb 28, 2003
priority date (Note) -
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Abstract
An apparatus for scatterometry measurements is disclosed. The apparatus includes a modulated pump source for exciting the sample. A separate probe beam is directed to interact with the sample and the modulated optical response is measured. The measured data is subjected to a scatterometry analysis in order to evaluate geometrical sample features that induce light scattering.
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