Gantry-type XY stage
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United States of America Patent
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-
Jul 3, 2007
Grant Date -
Feb 2, 2006
app pub date -
Oct 28, 2004
filing date -
Jul 30, 2004
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
Nine vibration isolating mounts are disposed on a pedestal, and a granite plate is placed thereon. A pair of guide bases are disposed on the granite plate, and disposed thereon are a pair of posts made of CFRP for movements in a Y-direction relative to the granite plate. A beam made of CFRP is extended between the pair of posts. Further, a movement base is disposed for movement in an X-direction relative to the beam, and a laser optical unit is mounted on the movement base.
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