Method of producing high aspect ratio domes by vapor deposition

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United States of America Patent

PATENT NO 7238241
APP PUB NO 20030209197A1
SERIAL NO

10421319

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Abstract

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An apparatus for the manufacture of chemical vapor deposited domes. The apparatus has a vapor deposition chamber with a plurality of sides, a base and a top where the base has a reactant port for receiving a flow of chemical reactants. A male mandrel is joined to one of a plurality of sides of the deposition chamber such that the flow of chemical reactants in the vapor deposition chamber does not impinge on the mandrel.

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Patent Owner(s)

Patent OwnerAddress
HELLMA MATERIALS GMBH07745 JENA

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Goela, Jitendra S Andover, MA 40 889
Salihbegovic, Zlatko New Iberia, LA 18 121

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