Wafer staging platform for a wafer inspection system
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United States of America Patent
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Jun 12, 2007
Grant Date -
Apr 15, 2004
app pub date -
Jul 18, 2003
filing date -
Jul 18, 2002
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A wafer staging platform for a wafer inspection system for inspecting of semiconductors or like substrates and method of handling wafers. The platform and related method is designed to reduce the amount of time needed to exchange wafers on a processing tool. The staging platform can include a vacuum-assisted feature. The method of handling includes simultaneously processing a plurality of wafers, during which the staging platform is employed to temporarily store wafer(s) in close proximity to a next in line station.
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