Method of forming sputtering articles by multidirectional deformation
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United States of America Patent
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Jun 12, 2007
Grant Date -
Feb 17, 2005
app pub date -
Jun 2, 2004
filing date -
Jun 9, 2003
priority date (Note) -
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Abstract
A method of producing a valve metal mill form having dimensions sufficient to be divided to form a plurality of sputter targets is described. The method includes multidirectional deformation of an ingot to form a mill form having a preferred average grain size of about 100 microns or less and/or a texture substantially void of textural bands.
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