Inkjet head and a method of manufacturing the same
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United States of America Patent
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Jun 5, 2007
Grant Date -
Jan 20, 2005
app pub date -
Jul 14, 2004
filing date -
Jul 14, 2003
priority date (Note) -
Expired
status (Latency Note)
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Abstract
An inkjet head is provided and includes: a chamber substrate for forming an ink flow passage; a diaphragm substrate including a diaphragm for pressurizing a pressure chamber disposed in the chamber substrate; and a nozzle substrate for jetting ink pressurized by the diaphragm, wherein the diaphragm substrate is made of silicon, the diaphragm is made of a material selected from the group of silicon oxide film and metal film, and the diaphragm is formed in the diaphragm substrate. A method of manufacturing the inkjet head is also provided.
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