Capillary tubing
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United States of America Patent
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May 15, 2007
Grant Date -
Aug 11, 2005
app pub date -
Jul 18, 2003
filing date -
Jul 23, 2002
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A method and an arrangement for generating x-ray or EUV radiation are disclosed. Target material is supplied from a container for target material to a jet-forming orifice in an interaction chamber by means of a flexible capillary tubing of considerable length, wherein the orifice is an integral part of the capillary tubing. A jet formed by urging target material through the orifice is made to interact with a beam of energy, thus producing a radiating plasma emitting the desired electromagnetic radiation. The use of a flexible capillary tubing for supplying target material from a source of target material to an orifice, which is integrated with the tubing, within an interaction chamber, in order to form therein a jet of target material for interaction with an energy beam to generate x-ray or EUV radiation, is also disclosed.
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