Optical control interface between controller and process chamber
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United States of America Patent
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May 15, 2007
Grant Date -
Apr 14, 2005
app pub date -
Jul 26, 2004
filing date -
Jul 25, 2003
priority date (Note) -
Expired
status (Latency Note)
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Abstract
The present invention relates to interfacing new sensors to incumbent controls. In particular, it relates to optically interfacing a new sensor, such as a spectrometer with plasma generator, to an incumbent electro-optical sensor. Logic and resources to control activation of the incumbent electro-optical sensor may be included. Particular aspects of the present invention are described in the claims, specification and drawings.
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