Crystallization apparatus and crystallization method
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United States of America Patent
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May 15, 2007
Grant Date -
Jun 10, 2004
app pub date -
Dec 1, 2003
filing date -
Dec 4, 2002
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A crystallization apparatus includes an illumination system which illuminates a phase shifter having a phase shift portion, and irradiates a polycrystal semiconductor film or an amorphous semiconductor film with a light beam having a predetermined light intensity distribution in which a light intensity is minimum in a point area corresponding to the phase shift portion of the phase shifter, thereby forming a crystallized semiconductor film, the phase shifter has four or more even-numbered phase shift lines which intersect at a point constituting the phase shift portion. An area on one side and an area on the other side of each phase shift line have a phase difference of approximately 180 degrees.
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