Calibrated pressure sensor
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United States of America Patent
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May 8, 2007
Grant Date -
Jul 20, 2006
app pub date -
Dec 30, 2004
filing date -
Dec 30, 2004
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A control system coupled to a pressure sensor calibrates the pressure sensor. The control system may measure a plurality of capacitance values at a plurality of corresponding applied voltages to compare the values with a first calibration mechanism generated by sample pressure sensors in a comparison. A final calibration mechanism may be generated by adjusting the first calibration mechanism in response to the comparison. The unknown differential pressure may be applied to a diaphragm of the pressure sensor. A capacitance value at the unknown differential pressure may then be measured. Using the final calibration mechanism, the differential pressure at the measured capacitance value may be retrieved.
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