Method and system for a mass flow controller with reduced pressure sensitivity
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United States of America Patent
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May 8, 2007
Grant Date -
Dec 29, 2005
app pub date -
Jul 8, 2004
filing date -
Jul 8, 2004
priority date (Note) -
Expired
status (Latency Note)
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Abstract
Systems and methods for mass flow controllers which minimize false flow conditions and display a reduced sensitivity to pressure transients are disclosed. Pressure gradients that exist within the volume of a mass flow controller fluid path are minimized in order to limit the potential energy contained in compressed or pressurized process gas. Additionally, process gas pressure may be monitored using a pressure sensor. This pressure signal is utilized in conjunction with a control algorithm to cancel the detrimental effect of certain flow components. These mass flow controllers may be used as drop in replacements for legacy mass flow controllers and reduce the cost of gas sticks due to elimination of discrete components such as pressure regulators, gas filters, pressure transducers, local pressure displays, isolation valves, seals, etc.
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