Semiconductor manufacturing system and wafer holder for semiconductor manufacturing system
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United States of America Patent
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Apr 24, 2007
Grant Date -
Jul 21, 2005
app pub date -
May 6, 2004
filing date -
Jan 15, 2004
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A semiconductor manufacturing system and wafer holder for a semiconductor manufacturing system which prevents a semiconductor wafer from being exposed to a process reaction and which includes a reaction tube for providing a sealed process space and a dual boat and which prevents the backside deposition by the wafer holder. The wafer holder includes a holder body to hide the backside of the semiconductor wafer during a process in the reaction tube and a wafer lifter having a portion that can be disengaged from and coupled to the holder body so that a lower portion of the semiconductor wafer is supported by the dual boat and so that the semiconductor wafer can be lifted up from the wafer body when the semiconductor wafer is loaded and unloaded. A separation boundary between the holder body and the wafer lifter includes a gas inflow interception surface to hinder reaction gas from flowing through the separation boundary.
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