Method for producing high-speed vertical npn bipolar transistors and complementary MOS transistors on a chip

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United States of America Patent

PATENT NO 7205188
APP PUB NO 20040209418A1
SERIAL NO

10450006

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Abstract

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The invention relates to a method for producing high-speed vertical npn bipolar transistors and complementary MOS transistors on a chip. In order to produce these high-speed vertical npn bipolar transistors and complementary MOS transistors on a chip, all technological method steps for producing the vertical structure of the collector, base and emitter in the active region of the npn bipolar transistors as well as for laterally structuring the collector regions, base regions and emitter regions are performed before the troughs and the gate insulating layer for the MOS transistors are produced.

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Patent Owner(s)

Patent OwnerAddress
IHP GMBH - INNOVATIONS FOR HIGH PERFORMANCE MICROELECTRONICS/INSTITUT FUR INNOVATIVE MIKROELEKTRONIKIM TECHNOLOGIEPARK 25 D-15236 FRANKFURT (ODER)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Heinemann, Bernd Frankfurt an der Oder, DE 21 333
Knoll, Dieter Frankfurt an der Oder, DE 19 354

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