Coating method

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United States of America Patent

PATENT NO 7201942
APP PUB NO 20030054099A1
SERIAL NO

10215858

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A method for the production of coated substrates, such as OLEDs is disclosed, whereby at least one layer is deposited on the at least one substrate, by means of a condensation method and a solid and/or fluid precursor and, in particular, at least one sublimate source is used for at least one part of the reaction gases. The invention is characterized in that, by means of a temperature control of the reaction gases between precursor source(s) and substrate, a condensation of the reaction gases before the substrate(s) is avoided.

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Patent Owner(s)

Patent OwnerAddress
AIXTRON AG52134 HERZOGENRATH

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Jurgensen, Holger Aachen, DE 31 1019
Kappeler, Johannes Wurselen, DE 19 347
Schmitz, Dietmar Aachen, DE 9 106
Strauch, Gerd Aachen, DE 9 514

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