Lithographic apparatus and device manufacturing method
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United States of America Patent
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Apr 3, 2007
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app pub date -
Nov 12, 2003
filing date -
Nov 12, 2002
priority date (Note) -
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Abstract
A lithographic projection apparatus is disclosed in which a space between the projection system and the substrate is filled with a liquid. An edge seal member at least partly surrounds the substrate or other object on a substrate table to prevent liquid loss when edge portions of the substrate or other object are, for example, imaged or illuminated.
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