Material for forming insulation film and film-forming method with the use of the material
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United States of America Patent
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Mar 27, 2007
Grant Date -
May 5, 2005
app pub date -
Oct 21, 2004
filing date -
Oct 30, 2003
priority date (Note) -
Expired
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Abstract
A material for forming an insulation film comprising an alkoxide compound of lithium and at least one kind of organic solvent selected from ether, ketone, ester, alcohol, and hydrocarbon. A material for forming an insulation film comprising a carboxylate of lithium, an organic solvent, and tetramethoxysilane or tetraethoxysilane. A film-forming method for forming an insulation film with the use of the material for forming an insulation film. An insulation film-forming over the various substrates by spin coating method, mist deposition method or CVD method with the use of these material becomes possible and enables to expect providing an insulation film of high quality and high purity containing lithium or lithium silicate.
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