Image forming method and charged particle beam apparatus
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United States of America Patent
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Mar 6, 2007
Grant Date -
Feb 1, 2007
app pub date -
Dec 12, 2005
filing date -
Jul 29, 2005
priority date (Note) -
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Abstract
An image forming method and a charged particle beam apparatus suitable for suppressing the inclination of charging when scanning a two-dimensional area with a charged particle beam. A third scanning line located between a first scanning line and a second scanning line is scanned. After the first, second and third scanning lines have been scanned, a plurality of scanning lines are scanned between the first and third scanning lines and between the second and third scanning lines.
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