Sensor device for determining the layer thickness of a thin layer
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United States of America Patent
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Mar 6, 2007
Grant Date -
Oct 16, 2003
app pub date -
Apr 10, 2003
filing date -
Apr 16, 2002
priority date (Note) -
Expired
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Abstract
To provide a sensor device for determining the layer thickness of a thin layer of an electrically conducting or semiconducting material which can be used in a simple and low-cost way, it is proposed that the said sensor device comprises one or more inductive proximity sensors which can be positioned at a distance from the layer, an inductive proximity sensor having an oscillator with a frequency which is adapted with respect to the material and the thickness range of the layer to be measured.
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